The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:Thin-film integrated passives as an alternative to discrete passivesThe possibility of piezoelectric MEMSSolutions for MEMS gyroscopesAdvanced interconnect technologiesAmbient energy harvestingBulk acoustic wave resonatorsUltrasonic receiver arrays using MEMS sensorsOptical MEMS-based spectrometersThe integration of MEMS resonators with conventional circuitryA wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patternsWireless microactuators to enable implantable MEMS devices for drug deliveryMEMS technologies for tactile sensing and actuation in roboticsMEMS-based micro hot-plate devicesInertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoringSensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
This book brings together groundbreaking research in MEMS technology and explores a wide range of novel applications enabled by the technology. International experts from industry and academia explain the theoretical background and share insights on applying the technology. Covering the historical evolution and recent trends, they examine gyroscopes, ambient energy harvesting, interconnects, resonators, micro hot-plate devices, wearable sensor assemblies, wireless microactuators, and much more. Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for further research and new applications.
